JSM-IT500HR InTouchscope SEM

Smart-Flexible-Powerful SEM with Exceptional Fidelity at Any kV

This game-changing SEM delivers high-resolution Field Emission SEM performance with the ease of operation you’ve come to know with our Tungsten SEMs. With its high-brightness, long-life emitter, it delivers exceptional fidelity at any kV. The JSM-IT500HR provides expanded performance over traditional W SEMs at a very attractive price.

Powerful High-Resolution Performance

This state-of-the-art SEM, with its high-brightness electron gun system, provides amazing high-resolution imaging along with high sensitivity and high spatial resolution analysis at even faster speeds. The IT500HR achieves a resolution of 1.5nm at 30kV, and 4nm at 1kV.

Versatile Analytical Microscope

The large analytical chamber allows you to create a nano-lab with your SEM, with multiple ports to accommodate a wide variety of detectors. Multiple EDS detectors, WDS, EBSD, and CL detectors can all be installed. Our column design ensures optimized geometry for all detectors.

The large specimen chamber with stage mounted inside allows easy sample loading and manipulation. By mounting the stage inside the chamber, we enable users to secure large, heavy and odd shaped objects on the stage with clear positioning prior to evacuating the chamber.

The IT500HR accommodates a wide variety of sample types.  Low vacuum capability is built in allowing for imaging and analysis of all types of samples in their native state.

Our analytical series includes JEOL’s fully-embedded EDS system which provides real-time EDS spectra during image observation. With automated montaging, the SEM automatically collects montage images and EDS data. 

Fast Navigation

High resolution observation is at your fingertips with our new high-brightness electron gun and lens system. Zeromag simplifies navigation, breaking the boundary between the optical and SEM image. The optical image (using our Stage Navigation System) in the main display can be used to locate the area of interest and set analysis points. By zooming in, you will transition automatically to the live SEM image.

InTouchScope™ Experience

Our InTouchScope™ series SEMs are designed to make SEM accessible to everyone. All the controls are at your fingertips with its intuitive software interface. You can operate this SEM with multi-touch gestures along with keyboard/mouse. It also includes an operation panel for those looking for a more traditional feel. Advanced automatic algorithms will produce clear images in a snap. There is even a ‘Navi’ mode with guided operation from sample introduction to automatic condition setting for new or occasional users.



  • High resolution SEM with high brightness, long life emitter (1.5nm at 30kV, 4nm at 1kV)
  • Magnification up to 600,000X (print), >1,670,000X (display)
  • Fully integrated and automated low vacuum system
  • Large analytical chamber and stage can cover samples 178mm (d) x 80mm (h)
  • Navigation is easy with embedded colour camera
  • Small foot print and easy maintenance (no cooling water or compressed gas required)