Electron Probe Microanalyser (EPMA)

JXA-8230 Electron Probe Microanalyser

JEOL has developed a new EPMA(Electron Probe Microanalyser), that continues a long history of EPMA development extending over nearly a half century.  The JXA-8230, designed for user-friendly operations, provides for a complete range of analyses through a new, simple to use, PC-based interface.  The high-accuracy and fast speeds offered by the JXA-8230 are a result of its sophisticated hardware developed from JEOL's EPMA technologies refined over nearly 50 years.  The JXA-8230 is powerful, next-generation, analytical tool that fully meets all of the requirements of an EPMA.

The EDS, which is a versatile and easy-to-use X ray detector, can be mounted. A combined WDS snd EDS system provides a seamless and user-friendly environment for analysis.

JXA-8530FPlus Field Emission Electron Probe Microanalyser

JEOL commercialized the world's first FE-EPMA, the JXA-8500F in 2003. This highly regarded FE-EPMA has long been used in various fields, such as: metals, materials and geology in both industry and academia. The JXA-8530FPlus is a third-generation FE-EPMA that comes with enhanced analytical and imaging capabilities. The In-Lens Schottky field emission electron gun combined with new software provides higher throughput while maintaining high stability, thus allowing a wider range of EPMA applications to be achieved with higher resolution.

The In-Lens Schottky Plus FEG EPMA version, with an optimized angular current density, allows for analysis with a large probe current of 2μA or more. The resolution of secondary electron image has been improved even under analytical conditions by automatically adjusting for the correct convergence angle.

A wealth of Microsoft Windows®-based advanced applications systems are available, including:

  1. Trace Element Analysis Program for simpler, optimized analysis of trace elements including adding data collected from up to 5 spectrometers,
  2. Phase Map Maker for automatic creation of phase maps based on principal components,
  3. Non-Flat Surface Analysis Program for automated WDS analysis of specimens with surface irregularities. This is possible due to the large Z travel of the stage (7.5 mm).

Various X-ray spectrometers (WDSs) can be selected: a Rowland circle radius of 140 mm (140R) or 100 mm (100R), 2 crystal or 4 crystal configurations and a mix of standard or large size crystals.
The XCE (2 xtl) X-ray Spectrometer, the FCS (4 xtl) X-ray spectrometer and the L (large 2 xtl) X-ray Spectrometer for 140R have wide spectrometry range and provide superior wavelength resolution and peak-to-background ratio. The H Type X-ray Spectrometer of 100R provides high X-ray intensity. Users can select from these spectrometers depending on requirements.

The JXA-8530FPlus comes with JEOL's 30mm2 silicon-drift detector (SDD).
A high count-rate SDD along with an in-situ variable aperture enables EDS analysis at WDS conditions. EDS spectra, maps and line scans can be acquired simultaneously with WDS data.

The JXA-8530FPlus is equipped with a highly-expandable specimen chamber and specimen exchange chamber, enabling you to integrate a variety of optional attachments on the chamber.

These include:

  • Electron Backscatter Diffraction System (EBSD)
  • Tilting rotating sub-stage
  • Cathodoluminescence Detectors (panchromatic, monochromatic, full color hyperspectral)
  • Soft X-ray Emission Spectrometer
  • Air Isolated Transfer Vessel
  • High Etching Rate Ion Source, in-situ cleaner, etc.