Field Emission SEMs

JSM-7200F Schottky Field Emission Scanning Electron Microscope

JSM-7200F has much higher spatial resolution than the conventional models at both high and low accelerating voltages by applying the technology used for “In-Lens SchottkyPlus”, the electron optics equipped on our flagship-model, JSM-7800FPRIME, and by incorporating TTLS (Through-The-Lens System). The maximum probe current of 300 nA is also guaranteed because of the above mentioned features. Thus, JSM-7200F is a next-generation multi-purpose FE-SEM that has capability of high resolution observation, high throughput analysis, ease of use, and expandability.

The main features of JSM-7200F are “In-Lens SchottkyPlus” technology-based electron optics, GB (Gentle Beam mode), TTLS (Through-The-Lens System) that enables high resolution observation at low accelerating voltage and control the amount of low-energy signals to be detected by the upper detectors, and a hybrid objective lens that combines magnetic-lens and electrostatic-lens.

Specifications

 

JSM-7200F

 

Resolution (1 kV)

1.6 nm

Resolution (20 kV)

1.0 nm

Resolution (Analysis)

3.0 nm
(15 kV, WD:10 mm, probe current:5 nA)

Magnification

x10 to x1,000,000

Accelerating voltage

0.01 to 30 kV

Probe current

1 pA to 300 nA

Detector (standard)

UED, LED

Detector (optional)

USD, RBED

Electron gun

In-lens Schottky field emission electron gun

Aperture angle control lens

Built in

Objective lens

Conical lens

Specimen stage

Fully eucentric goniometer stage

Stage movement

X: 70 mm, Y: 50 mm, Z: 2 to 41 mm,
Tilt: -5 to 70°, Rotation: 360°

Motor control

5 axes motor controlled

Specimen exchange chamber

Maximum diameter : 100 mm
Maximum height : 40 mm
(vented with dry nitrogen)

JSM-7610F Schottky Field Emission Scanning Electron Microscope

JSM-7610F is an ultra-high resolution Schottky Field Emission Scanning Electron Microscope which has semi-in-lens objective lens. High power optics can provide high throughput and high performance analysis. It’s also suitable for high spatial resolution analysis. Furthermore, Gentle Beam mode can reduce the incident electron penetration to the specimen, enabling you to observe its topmost surface by using a few hundred landing energy.

Specifications

SEI resolution

1.0nm (15kV) , 1.3nm (1kV) , During analysis 3.0 nm (15 kV、 probe current 5 nA)

Magnification

25 to 1,000,000

Accelerating voltage

0.1kV to 30kV

Probe current

A few pA  to 200nA 

Aperture angle control lens

Built-in

Detectors

Upper detector, lower detector

Energy filter

New r-filter

Gentle Beam

Built-in

Specimen stage

Eucentric, 5 axes motor control

  Type

Type II (Optional)

  X-Y

110mm×80mm

  Tilt

-5° to +70°

  Rotation

360°endless

  WD

1.0mm to 40mm

Evacuation system

Two SIPs, TMP, RP

JSM-7800FPRIME Schottky Field Emission Scanning Electron Microscope

JSM-7800FPRIME delivers the world's best resolution with the incorporation of the newly-developed, super-high resolution Gentle Beam (GBSH). In addition, the maximum probe current of the In-lens Schottky Plus gun has been increased from 200 nA to 500 nA.

 

Specifications

Resolution

0.7 nm(15 kV)
0.7 nm(1 kV)
3.0 nm (5 kV、WD10 mm、5 nA)

Magnification

x25 to x1,000,000(SEM)

Accelerting Voltage

0.01kV to 30kV

Probe current

Several pA to 500nA

Aperture angle optimizing lens

Built-in

Detectors

Upper Electron Detector(UED) 

Lower Electron Detector(LED)

Energy filter

UED Filter Voltage Change Function built-in

Gentle beam

Built-in

Image display

Image display area 1,280 x 960 pixel, 800 x 600 pixel

Specimen exchange chamber

Standard
 Specimen Exchange Chamber TYPE2A

Specimen stage

5-axis motor drive stage
Full eucentric goniometer stage

 X-Y

X:70mm, Y:50mm

 Tilt

-5 to +70°

 Rotation

360°

 WD

2mm to 25mm

Evacuation system

Two SIPs, TMP, RP

Eco design

During normal operation :1.3kVA
During the sleepmode : 0.8kV